A micromachined deformable mirror for optical wavefront compensation
نویسندگان
چکیده
A silicon micromachined deformable mirror QiDM) has been developed by Boston University and Boston Micromachines Corporation (BMC). The pDM employs a flexible silicon mirror supported by mechanical attachments to an array of electrostatic parallel plate actuators. The integrated system of mirror and actuators was fabricated by surface micromachining using polycrystalline silicon thin films. The mirror itself measures 3 mm x 3 mm x 3 jim, supported by a square array of 140 electrostatic parallelelectrode actuators through 140 attachment posts. Recently, this pDM was characterized for its electromechanical and optical behavior and then integrated into two laboratory-scale adaptive optics systems as a wavefront correction device. Figures of merit for the system include stroke of 2 jim, resolution of 10 nm, and frequency bandwidth of 6.7 kHz. The device is compact, exhibits no hysteresis, and has good optical quality.
منابع مشابه
Micromachined Deformable Mirrors for Dynamic Wavefront Control
The design, manufacture, and testing of optical quality surface micromachined deformable mirrors (DMs) is described. With such mirrors, the shape of the reflective surface can be modified dynamically to compensate for optical aberrations and thereby improve image resolution in telescopes or microscopes. Over several years, we have developed microelectromechanical system (MEMS) processing techno...
متن کاملControl of a deformable mirror subject to structural disturbance
Future space based deployable telescopes will be subject to non-atmospheric disturbances. Jitter and optical misalignment on a spacecraft can be caused by mechanical noise of the spacecraft, and settling after maneuvers. The introduction of optical misalignment and jitter can reduce the performance of an optical system resulting in pointing error and contributing to higher order aberrations. Ad...
متن کاملAberration-free dynamic focusing with a multichannel micromachined membrane deformable mirror.
We demonstrate aberration-free dynamic focusing with a low-cost 19-channel continuous-surface micromachined membrane deformable mirror (MMDM). A lookup table of the optimum control voltages for various focal lengths is obtained with an adaptive optics algorithm. Diffraction-limited imaging resolution is achieved owing to the capability of the MMDM for aberration compensation. The measured speed...
متن کاملExact Wavefront Correction in Adaptive Optics
In this work we consider an adaptive optical system in which a deformable mirror is controlled to compensate for random wavefront disturbances. For most systems of this type, the shape of the mirror is taken as a linear function of the wavefront error, leading to satisfactory results in linear regimes. Here, the geometric shape of the mirror leading to a perfect correction of the wavefront is d...
متن کاملAdaptive optic correction using microelectromechanical deformable mirrors
Mark N. Horenstein Boston University Electrical and Computer Engineering Boston, Massachusetts 02215 Abstract. A micromachined deformable mirror (m-DM) for optical wavefront correction is described. Design and manufacturing approaches for m-DMs are detailed. The m-DM employs a flexible silicon membrane supported by mechanical attachments to an array of electrostatic parallel plate actuators. De...
متن کامل